Universal Lift For Semiconductor Wafer Fabs
Articulated Arm, Load and Obstacle Sensing, Telescoping Mast, Deployable Outriggers, ISO 5 (Class 100) Cleanroom, SEMI and CE rated,
375 lb [170 kg] Semiconductor Components
This multi-purpose lift’s compact design features a high reaching telescopic mast, maximizes Cleanroom floor space with its small footprint and offers the unique ability to handle large loads. The articulated arm has many end-effector attachments that can handle pumps, valves, robots, other components and has the capability to service production tools in a wafer fab. The system can perform in an ISO 5 Cleanroom and can service process equipment from many different manufacturers (Lithography, Ingot Production, Polishing/CMP, Etch, PVD, CVD, Implant, Die/Sort).