Semiconductor Cleanroom Lift with Rotating Gripper
Quick Exchange Fixture, Powered Rotating Head, Load & Obstacle Sensing, Powered Telescoping Legs, ISO 5 (Class 100) Cleanroom, SEMI & CE rated
300 lb [136 kg] Semiconductor Modules
Configured for use in an ISO 5 (Class 100) cleanroom, this lift is designed specifically for installing lithography modules in a wafer fab. Quick exchange fixtures tailored to handle different modules can be easily installed into a powered rotating head. The lift’s compact design allows the lift to be pushed sideways down narrow aisles. Interlocks require the powered telescoping legs to be extended before the module is rotated outward, ensuring stability at an extended reach. This system eliminates the risky handling of a valuable semiconductor component.